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Litho Cluster
Lithography/ Cleaning



Automatic cassettes to cassettes system :
(Priming, Spinner, Coater, Puddle, Spray development, Hotplate, Coolplate, Resist deposition, Cleaning wafer and mask) for treatments of wafers from 2" to 8" and substrate from 2" x 2" to 6" x 6".

Computer software for programming, Color display 19" touch screen, USB Connexion and Intranet, ...

Contact us for more information


+33(0)4 90 40 60 90
+33(0)4 90 40 61 05 (FAX)



ZA la Garrigue du Rameyron
84830 Serignan-Du-Comtat
FRANCE
Lun-Ven : 08h30 - 17h00
microtest@microtest-semi.com

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