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Rapid Thermal Process ovens : RTP range



Various models :

RTP-100 : for wafer 4" (+ 1 200°C)

RTP-150 : for wafer 6" (+ 1 000°C)

VPO-1000-300 : for wafer 12" (+ 1 000°C),


Programmable temperature up and down ramp,

Heating provided by IR ou UV lamps,

Temperature regulated by PID

Cooling provided by neutral or water,

Gas flow control by flowmeter,

50 recipes available with maximum 50 steps,

USB interface ...


Options :

Extra gas line by flowmeter

Additional Thermocouple  ...




Download the data sheet RTP:
+33(0)4 90 40 60 90
+33(0)4 90 40 61 05 (FAX)



ZA la Garrigue du Rameyron
84830 Serignan-Du-Comtat
FRANCE
Lun-Ven : 08h30 - 17h00
microtest@microtest-semi.com

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